19-042-110

Foamtec UltraSOLV™ ScrubPADS™

Manufacturer: Fischer Scientific

The price for this product is unavailable. Please request a quote

Product Type

Vacuum Chamber Cleaning Scrub Pad

For Use With (Application)

Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear

Grit

220

Length (English)

4 in.

Material

Silicone Carbide

Dimensions (L x W x H)

3 x 4 in.

For Use With (Equipment)

Wafer processing tools

Includes

Without slit

Length (Metric)

10.16 cm

Thickness (English)

0.078 in.

Description

  • Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools
  • Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear Fiber-free construction reduces particle levels in cleaned tools Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures Enables the elimination of H 2 O 2 from PMs, which greatly reduces recovery times

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Fischer Scientific

19-042-110

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Product Type:
Vacuum Chamber Cleaning Scrub Pad

For Use With (Application):
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear

Grit:
220

Length (English):
4 in.

Material:
Silicone Carbide

Dimensions (L x W x H):
3 x 4 in.

For Use With (Equipment):
Wafer processing tools

Includes:
Without slit

Length (Metric):
10.16 cm

Thickness (English):
0.078 in.

Img

Fischer Scientific

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Product Type:
__

For Use With (Application):
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear

Grit:
280

Length (English):
__

Material:
Silicone Carbide

Dimensions (L x W x H):
__

For Use With (Equipment):
__

Includes:
Without slit

Length (Metric):
10.16 cm

Thickness (English):
__

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Fischer Scientific

19-042-113

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Product Type:
__

For Use With (Application):
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear

Grit:
600

Length (English):
__

Material:
Silicone Carbide

Dimensions (L x W x H):
__

For Use With (Equipment):
__

Includes:
Without slit

Length (Metric):
10.16 cm

Thickness (English):
__

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Product Type:
ESD Wipe

For Use With (Application):
For cleaning critical tools and assemblies, Class 10

Grit:
__

Length (English):
9 in.

Material:
Polyurethane Foam

Dimensions (L x W x H):
__

For Use With (Equipment):
For safe cleaning of static sensitive assemblies, such as wafer transfer chambers in vacuum tools

Includes:
__

Length (Metric):
22.86 cm

Thickness (English):
__