19-306-102
Foamtec UltraSOLV™ ScrubPADS™
Manufacturer: Fischer Scientific
The price for this product is unavailable. Please request a quote
Product Type
Vacuum Chamber Cleaning Scrub Pad
For Use With (Application)
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
Grit
1200
Length (English)
4 in.
Material
Diamond
Dimensions (L x W x H)
3 x 4 in.
For Use With (Equipment)
Wafer processing tools
Includes
Slit
Length (Metric)
10.16 cm
Thickness (English)
0.078 in.
Description
- Ideal for wafer processing tools such as LAM 9600 and 2300 Etch chambers, Hitachi Etch chambers, TEL Etch Chambers, Varian Ion Implant Process Areas, Novellus Speed, AMAT TxZ, WxZ, DxZ, SinGEN, PolyGEN, Endura and Producer CVD, PVD tools and Roth and Rau SiNX CVD tools
- Wide grit selection allows for quick removal of process-induced residue from aluminum, stainless steel, ceramic, glass, quartz and anodized surfaces while minimizing tool wear Fiber-free construction reduces particle levels in cleaned tools Unique bonding technology minimizes the release of abrasive particles leading to cleaner PM procedures Enables the elimination of H 2 O 2 from PMs, which greatly reduces recovery times
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Product Type: Vacuum Chamber Cleaning Scrub Pad
For Use With (Application): Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
Grit: 1200
Length (English): 4 in.
Material: Diamond
Dimensions (L x W x H): 3 x 4 in.
For Use With (Equipment): Wafer processing tools
Includes: Slit
Length (Metric): 10.16 cm
Thickness (English): 0.078 in.
Product Type:
Vacuum Chamber Cleaning Scrub Pad
For Use With (Application):
Quick removal of process induced residue from Aluminum, Stainless Steel, Ceramic, Glass, Quartz and Anodized surfaces while minimizing tool wear
Grit:
1200
Length (English):
4 in.
Material:
Diamond
Dimensions (L x W x H):
3 x 4 in.
For Use With (Equipment):
Wafer processing tools
Includes:
Slit
Length (Metric):
10.16 cm
Thickness (English):
0.078 in.
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