901621
Buffered oxide etchant (BOE) 10:1
Manufacturer: Sigma Aldrich
Synonym(S): BHF, Buffered HF
Select a Size
| Pack Size | SKU | Availability | Price |
|---|---|---|---|
| 1 L | 901621-1-L | In Stock | ₹ 10,839.83 |
901621 - 1 L
In Stock
Quantity
1
Base Price: ₹ 10,839.83
GST (18%): ₹ 1,951.169
Total Price: ₹ 12,790.999
form
liquid
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Description
- General description: Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO2) or silicon nitride (Si3N4). It is a mixture of a buffering agent, such as ammonium fluoride (NH4F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.
- Application: Buffered oxide etchant (BOE) 10:1 can be used in the etching of titanium carbide, which can be used in microelectromechanical systems (MEMS).[1] It can also be used in the etching of spin-on-dopant (SOD) for the development of conductor-insulator-conductor tunneling diodes.[2] It can also be used to enhance the surface of fused quartz devices.[3]
SAFETY INFORMATION
Pictograms
Signal Word
Danger
Hazard Statements
Precautionary Statements
P261 - P271 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338
Hazard Classifications
Acute Tox. 2 Dermal - Acute Tox. 3 Inhalation - Acute Tox. 3 Oral - Eye Dam. 1 - Skin Corr. 1B
WGK
WGK 2
Flash Point(F)
Not applicable
Flash Point(C)
Not applicable
