901623

Buffered oxide etchant (BOE) 6:1 with surfactant

Manufacturer: Sigma Aldrich

Synonym(S): BHF, Buffered HF

Select a Size

Pack Size SKU Availability Price
1 L 901623-1-L In Stock ₹ 8,657.55

901623 - 1 L

₹ 8,657.55

In Stock

Quantity

1

Base Price: ₹ 8,657.55

GST (18%): ₹ 1,558.359

Total Price: ₹ 10,215.909

form

liquid

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Description

  • General description: Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO2) or silicon nitride (Si3N4). It is a mixture of a buffering agent, such as ammonium fluoride (NH4F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.
  • Application: Buffered oxide etchant (BOE) 6:1 with surfactant may be used in the oxide removal of AlGaN/GaN-based high electron mobility transistors for gate photolithography.[1][2] It may also be used in a buffer oxide etchant method for the fabrication of micro biochip.[3]

SAFETY INFORMATION

Pictograms

GHS06,GHS05

Signal Word

Danger

Hazard Statements

H300 + H310 + H330,H314

Precautionary Statements

P260 - P270 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338

Hazard Classifications

Acute Tox. 1 Dermal - Acute Tox. 2 Inhalation - Acute Tox. 2 Oral - Eye Dam. 1 - Skin Corr. 1A

WGK

WGK 2

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

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